Test Handler

ABSTRACT

A test handler is disclosed, which comprises a test tray, at least one opening unit, and a position changing apparatus. The test tray aligns a plurality of inserts on its side. Each insert loads at least one semiconductor device thereon. The opening unit opens inserts at one part of the one side of the test tray. The position changing apparatus moves at least one opening unit in such a way that the at least one opening units can be located at another part of the one side of the test tray, such that the at least one opening units can open inserts at said another part of the one side of the test tray. The present invention can reduce the number of replaced parts according to change in the semiconductor device size, production cost, and part replacement time. Also, the present invention can be easily applied to various types of testers.

TECHNICAL FIELD

The present invention relates to a test handler, more particularly, toan insert- opening apparatus for opening the inserts of a test tray.

BACKGROUND ART

In general, a test handler is equipment allowing a tester to testsemiconductor devices fabricated by a certain fabricating process,sorting the semiconductor devices according to the test result, andloading the semiconductor devices onto user trays. The test handler hasbeen disclosed in many publication documents.

FIG. 1 is a perspective view of a conventional test handler 100. Theprimary elements of the conventional test handler 100 will now bebriefly described.

As shown in FIG. 1, the conventional test handler 100 includes a loadingapparatus 110, a soak chamber 120, a test chamber 130, a de-soak chamber140, an unloading apparatus 150, two insert-opening apparatuses 160 aand 160 b, and two posture changing apparatuses 170 a and 170 b. Eachelement of the test handler 100 will be described in more detail below.

The loading apparatus 110 transfers and loads semiconductor devicesloaded onto user trays 10 a to a test tray 11 a situated at a loadingposition.

The soak chamber 120 has a temperature environment forpre-heating/pre-cooling the semiconductor devices loaded on the testtray. The soak chamber 120 receives the test tray that is completed theloading of the semiconductor devices by the loading apparatus 110. Whenthe test tray enters the soak chamber 120, it is translated closely tothe test chamber 130, maintaining its vertical posture. For translation,the semi-conductor devices loaded on the test tray are sufficientlypre-heated/pre-cooled.

The test chamber 130 is installed to the test handler, in which a tester(not shown) tests the semiconductor devices loaded on two test trays 11b and 11 c translated from the soak chamber 120. For this, the testchamber 130 has a temperature environment for testing the semiconductordevices.

The de-soak chamber 140 (or a ‘restoring chamber’) restores the heatedor cooled semiconductor devices to a room temperature.

The unloading apparatus 150 sorts the semiconductor devices on the testtray outputted from the de-soak chamber 140, and transfers and unloadsthe semiconductor devices onto user trays 10 b (an unloading step).

Here, the loading apparatus 110 or the unloading apparatus 150 includesat least one pick-and-place apparatus (not shown) for picking up andwithdrawing the semiconductor devices loaded on the user tray or thetest tray, and for supplying the semiconductor devices to the user trayor the test tray. For example, the pick-and-place apparatus picks up andwithdraws the semiconductor devices from the user tray and then suppliesthem to the test tray in a loading operation. The pick-and-placeapparatus picks up and withdraws the semiconductor devices from the testtray and then supplies them to a sorting table (not shown), or suppliesthem from the sorting table to the user tray, in an unloading operation.

The two insert-opening apparatuses 160 a and 160 b open inserts arrangedin a matrix-form on the test trays 11 a and 11 b correspondinglysituated above their upper sides, respectively, such that the loadingapparatus 110 or unloading apparatus 150 can perform loading orunloading, respectively.

The posture changing apparatus 170 a changes the horizontal posture ofthe test tray 11 a, on which the semiconductor devices are loaded, intothe vertical posture. The posture changing apparatus 170 b changes thevertical posture of the test tray translated from the de-soak chamber140 to the horizontal posture.

The following is a more detailed description of the posture changing ofthe test tray in the test handler 100.

Firstly, an empty test tray is situated at the underside of the loadingapparatus 110, like a test tray 11 a. After semiconductor devices areloaded on the empty test tray, the test tray is transferred to theposture changing apparatus 170 a sited at the backside of the loadingapparatus 110, and then posture-changed. Then, the test tray istransferred to the soak chamber 120. After that, the test tray istranslated to the backside of the soak chamber 120 and then enters thetest chamber 130. The test tray is horizontally transferred in two rows(or one row), upper and lower, in the test chamber 130. Here, thesemiconductor devices on the test tray are tested by a tester (notshown) located at the middle portion of the test chamber 130. Afterbeing forwardly translated through the de-soak chamber 140, the testtray of the vertical posture is supplied to the posture changingapparatus 170 b located at the backside of the unloading device 150. Theposture changing apparatus 170 b changes the vertical posture of thetest tray to the horizontal posture. The horizontally posture-changedtest tray is transferred to the unloading apparatus 150 to unload thesemiconductor devices. After loading, the test tray is transferred belowthe loading apparatus 110. As such, the test tray performs theabove-described procedure sequentially to test the semiconductor devicesloaded thereon.

After loading the semiconductor devices onto the inserts arrayed in amatrix-form, the test tray is transferred, posture-changed, and tested.To achieve these operations, the inserts must have a mechanicalconfiguration to stably receive the semiconductor devices. Such aconfiguration was already published in Korean Patent No. 10-0486412,entitled TEST TRAY INSERT OF TEST HANDLER and filed by the applicant ofthis application (hereinafter, referred to as a ‘cited application’). Asdisclosed in the cited application, the inserts are configured toinclude a housing for receiving the semiconductor devices, a pair ofstoppers for opening the insert as the stoppers rotate to release theinsert at both ends of the housing, and a pair of lockers elasticallysupported by compression springs for preventing rotation of the stoppersand linearly being movable. Therefore, as long as the lockers do notovercome the elastic forces of the compression springs and move linearlyto release the stoppers, i.e., as long as the inserts are not opened,the semiconductor devices cannot be received by and separated from thehousing.

However, when the loading apparatus 110 performs such a loading, theinserts must be opened to allow the housing to receive the semiconductordevices stably. Also, when the unloading apparatus 150 performs such anunloading, the insert must be opened to separate the semiconductordevices from the housing. Therefore, in order to open the inserts, thetwo insert-opening apparatuses 160 a and 160 b, each correspondinglylocated at the underside of the loading apparatus 110 and unloadingapparatus 150, must operate the lockers to release the stoppers, inwhich the test trays 11 a and 11 d are each sited between theinsert-opening apparatus 160 a and the loading apparatus 110 and betweenthe insert-opening apparatus 160 b and the unloading apparatus 150.

FIG. 2 is a schematic perspective view illustrating a conventionalinsert-opening apparatus (160 a or 160 b).

The conventional insert-opening apparatus (160 a or 160 b) includes abase plate 161, a base cylinder 162 for linearly transferring the baseplate 161 toward a test tray, and four opening units 163 a, 163 b, 163 cand 163 d which are mounted on the base plate 161 in a 2×2 matrix-formin the direction of the test tray. The four opening units 163 a, 163 b,163 c and 163 d correspondingly include: plate openers 163 a-1, 163 b-1,163 c-1, and 163 d-1, each of which occupies a quarter of the test trayand arrays a plurality of pairs of opening pins 163-1 in a 2×8 matrixform, which are integrally formed, in which the plate opener 163 a-1,for example, opens the inserts in the quarter area allocated theretosimultaneously; and ascending/descending cylinders 163 a-2 and 163 c-2for linearly transferring the plate openers 163 a-1, 163 b-1, 163 c-1,and 163 d-1 toward the test tray. Here, the plate openers are describedas a ‘site decision unit’ in the cited application. On the other hand,FIG. 2 does not show ascending/descending cylinders for linearlytransferring the plate openers 163 b-1 and 163 d-1.

The following is a description of operations of the conventionalinsert-opening apparatus 160 a and 160 b shown in FIG. 2.

Firstly, the base cylinder 162 transfers the base plate 161 closely tothe test tray to secure a necessary distance for opening operations ofthe opening units 163 a, 163 b, 163 c, and 163 d. After that, any one ofthe four opening units 163 a, 163 b, 163 c, and 163 d, for exampleopening unit 163 a, operates to open the inserts arrayed in the quarterarea corresponding to the opening unit 163 a. For example, when theascending/descending cylinder 163 a-2 transfers the plate opener 163 a-1toward the test tray, the pairs of opening pins 163-1 of the plateopener 163 a-1 push and linearly transfer pairs of lockers mounted ineach inserts to rotate pairs of stoppers, thereby opening the insert.

As such, each of the four opening units 163 a, 163 b, 163 c, and 163 dopens 16 inserts arrayed in ¼ area of the test tray, respectively, suchthat all inserts arrayed in all area of test tray can be opened. Morespecifically, the four opening units 163 a, 163 b, 163 c, and 163 doperate sequentially as follows: for example, the opening unit 163 aopens the inserts arrayed in a quarter area of the test tray allocatedthereto, and closes the inserts after the semiconductor devices areloaded in or separated from the opened inserts; and then, the openingunit 163 b opens the inserts arrayed in another quarter area of the testtray allocated thereto, and so on.

As such, the opening units 163 a, 163 b, 163 c, and 163 d aresequentially operated so as not to apply a relatively large force to thetest tray, which may cause the test tray to bend. More specifically,when the four opening units are operated simultaneously, a relativelylarge force may be applied to the test tray, and when such a largeforce-applying state is maintained for a long time, the test tray maybend. Meanwhile, a pick-and-place apparatus including the loadingapparatus 110 and unloading apparatus 150 should be configured to belight for rapid processing and response speed. Thus, the pick-and-placeapparatus is generally configured to pick up and transfer no more than16 semiconductor devices. Therefore, since it is enough that the insertsare opened in concert with a one-time processing capacity of thepick-and-place apparatus, only the number of inserts corresponding tothe one-time processing capacity is sequentially opened. Thus, the forceapplied to the test tray can be minimized to prevent the test tray frombending.

On the other hand, test handlers tend to be developed to test morenumber of semiconductor devices at one time. Presently, a test trayarraying 32 or 64 inserts is commonly used, but, recently, a large-sizedtest tray having 128 or 160 inserts has been developed and will be soldon the market.

However, due to a structural restriction, the pick-and-place apparatusstill only has the capacity to test a maximum of 16 inserts. Therefore,in the case when a large-sized test tray is used, where 8 or 10 openingunits should be installed, the production cost of the test handler wouldbe increased.

Also, when the type of semiconductor devices to be tested is changed ora new type of tester is applied to the test handler, the test tray mustbe replaced. In this case, additional work should be done, such asadjusting the distance between a pair of opening pins. Therefore, all ofthe opening units, etc., should be replaced, respectively. When 8 or 10opening units are installed on a large-sized test tray, such replacementwork requires a lot of time and increased replacement costs, and causesa waste of resources.

DISCLOSURE OF INVENTION Technical Problem

Therefore, the present invention has been made in view of the aboveproblems, and it is an object of the present invention to provide a testhandler which is operable in such a way that it opens inserts arrayed inone part of a test tray and then moves to another part of the test trayand opens inserts arrayed there.

Technical Solution

In accordance with the present invention, the above object can beaccomplished by the provision of a test handler comprising: a test tray,on one side of which a plurality of inserts are arrayed, here, eachinsert can be loaded at least one semiconductor device thereon; at leastone opening unit for opening inserts at one part of the one side of thetest tray; and a position changing apparatus for moving at least oneopening unit in such a way that the at least one opening unit can belocated at another part of the one side of the test tray, such that theat least one opening unit can open inserts at said another part of theone side of the test tray.

Preferably, the test handler may further comprise: a pick-and-placeapparatus for loading the semiconductor devices on the test tray orpicking up the semiconductor devices from the test tray. Here, theposition changing apparatus moves the at least one opening unitindependently of the pick-and-place apparatus.

Preferably, the semiconductor device is loaded on or picked up from thetest tray of a horizontal posture. Also, the at least one opening unitis horizontally moved.

-   -   Preferably, the opening unit may include: a opener for        contacting and opening the inserts at the one part of the one        side of the test tray; and a linear moving apparatus for moving        the opener toward the inserts such that the opener can contact        the inserts.

Preferably, the linear moving apparatus is a cylinder.

Preferably, the position changing apparatus may include: a drivingsource for generating driving force necessary for movement of the atleast one opening unit; and a driving force transferring apparatus fortransferring the driving force from the driving source to the openingunit.

Preferably, the driving source is a motor.

Preferably, the driving source transferring apparatus may include: athreaded shaft, being rotated forward or backward according to operationof the motor; and an internally threaded nut, being received thethreaded shaft, being moved linearly along the axis of the threadedshaft according to the rotation of the threaded shaft, and being coupledto the opening unit.

-   -   Preferably, the opening unit is integrated into a module which        is detachably coupled to the driving force transferring        apparatus.

Preferably, the test handler may further comprise: a base plate forsupporting the opening unit through the position changing apparatus, inwhich the position changing apparatus is installed on the base plate;and a driver for linearly moving the base plate toward the test tray toselectively secure a distance necessary for an opening operation of theopening unit.

Preferably, the driver is a cylinder.

ADVANTAGEOUS EFFECTS

As described above, the insert-opening apparatus according to thepresent invention is operated in such a way that: while at least oneopening unit, which corresponds to a part of inserts aligned on a testtray, is sequentially moved, all the inserts of the test tray areprocessed by the opening units. Therefore, the present invention canreduce the number of fittings and thus decrease production cost. Also,the present invention can reduce maintenance costs due to replacementwork. In addition, since a plurality of opening units are integratedinto a module through an installation plate, such that the module can bedetachably coupled to guide blocks and coupling blocks, replacement of atest tray can be easily performed, thereby reducing replacement worktime. Furthermore the present invention can be conveniently applied tovarious types of testers.

BRIEF DESCRIPTION OF THE DRAWINGS

The above object, features and other advantages of the present inventionwill be more clearly understood from the following detailed descriptiontaken in conjunction with the accompanying drawings, in which:

FIG. 1 is a perspective view of a conventional test handler;

FIG. 2 is a perspective view of an insert-opening apparatus applied tothe conventional test handler of FIG. 1;

FIG. 3 is a perspective view of an insert-opening apparatus according toan embodiment of the present invention;

FIG. 4 is a top view of the insert-opening apparatus of FIG. 3;

FIG. 5 is a left side view of the insert-opening apparatus of FIG. 3;

FIG. 6 is a front view of the insert-opening apparatus of FIG. 3; and

FIGS. 7 to 10 are perspective views for describing operation states ofthe insert-opening apparatus of FIG. 3.

BRIEF DESCRIPTION OF SYMBOLS IN THE DRAWINGS

-   -   300: insert-opening apparatus    -   31 a, 31 b, 31 c, 31 d, 31 e, 31 f: opening unit    -   31 a-1, 31 b-1, 31 c-1, 31 d-1, 31 e-1, 31 f-1: opener    -   31 a-2, 31 b-2, 31 c-2, 31 d-2, 31 e-2, 31 f-2:        ascending/descending cylinder    -   31-1: a pair of opening pins    -   32: position changing apparatus    -   32 a: motor    -   32 b: threaded shaft    -   32 c: rotation belt    -   32 d: internally threaded nut    -   33: base plate    -   34: base cylinder    -   35: installation plate    -   36: coupling block

BEST MODE FOR CARRYING OUT THE INVENTION

With reference to the drawings, a preferred embodiment of theinsert-opening apparatus (hereinafter referred to as an openingapparatus) of a test handler, according to the present invention, willbe described in detail below.

FIG. 3 is a perspective view of an opening apparatus 300 according to anembodiment of the present invention. FIG. 4 is a top view of the openingapparatus 300 of FIG. 3. FIG. 5 is a left side view of the openingapparatus 300 of FIG. 3. FIG. 6 is a front view of the opening apparatus300 of FIG. 3.

Referring to FIG. 3, the opening apparatus 300 is configured to include:6 opening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f; a positionchanging apparatus 32, a base plate 33, a base cylinder 34, aninstallation plate 35, and a coupling block 36 as shown in FIG. 5.

The 6 opening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f serve to openinserts aligned on parts of area of a test tray, respectively. The 6opening units include: openers 31 a-1, 31 b-1, 31 c-1, 31 d-1, 31 e-1,and 31 f-1; and ascending/descending cylinders 31 a-2, 3 1 c-2, 31 e-2,correspondingly.

The openers 31 a-1, 31 b-1, 31 c-1, 31 d-1, 31 e-1, and 31 f-1 linearlymove toward the test tray. The openers 31 a-1, 31 b-1, 31 c-1, 31 d-1,31 e-1, and 31 f-1 include pairs of opening pins 31-1 for opening theinserts by linearly moving pairs of lockers of inserts on their surfacesfacing the test tray. Here, as shown in FIGS. 3 and 4, each of theopeners 31 a-1, 31 b-1, 31 e-1 and 31 f-1 includes 16 pairs of openingpins 31-1 to open 16 inserts. Also, both the openers 31 c-1 and 31 d-1include 8 pairs of opening pins 31-1 to open 8 inserts.

The ascending/descending cylinders 31 a-2, 31 c-2, and 31 e-2 areinstalled onto the upper surface of the installation plate 35 and movedtogether with the installation plate 35. The ascending/descendingcylinders 31 a-2, 31 c-2, and 31 e-2 enable the respective openers 31a-1, 31 c-1, and 31 e-1 to move linearly toward the test tray. Here, theascending/descending cylinders which enable the respective openers 31b-1, 31 d-1, and 31 f-1 to move linearly toward the test tray are notexposed in FIG. 3.

The position changing apparatus 32 is configured to move the 6 openingunits 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f along the contact surfaceof the test tray (refer to the arrow direction AB in FIG. 3) and thus tochange their positions. The position changing apparatus 32 includes amotor 32 a having a driving pulley 32 a-1, a threaded shaft 32 b havinga driven pulley 32 b-1, a rotating belt 32 c, a internally threaded nut32 d as shown in FIG. 5, a pair of guide rails 32 e, and a pair of guideblocks 32 f, etc.

The motor 32 a is fixedly mounted on a base plate 33 by motor brackets32 a-2, as shown in FIG. 6. The motor 32 a functions as a driving sourcefor supplying driving force such that the opening units 31 a, 31 b, 31c, 31 d, 31 e, and 31 f can move along the surface of the test trayfacing the opening units (refer to the arrow direction AB in FIG. 3).Therefore the motor 32 a can be rotated forward and backward.Preferably, the motor 32 a is implemented with a step motor or a servomotor to easily control the positions of the opening units 31 a, 31 b,31 c, 31 d, 31 e, and 31 f.

The threaded shaft 32 b is rotated by the motor 32 a. The threaded shaft32 b is aligned to be parallel to the moving direction of the 6 openingunits 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f. The threaded shaft 32 a isrotatably fixed to the base plate 33 through bearing blocks 32 b-2 and32 b-3 located at both ends thereof.

The rotating belt 32 c is configured to transfer a rotational force ofthe motor 32 a from the driving pulley 32 a-1 to the driven pulley 32b-1.

The internally threaded nut 32 d is received the threaded shaft 32 band, and at the same time, is coupled to the installation plate 35through the coupling block 36, such that the opening units 31 a, 31 b,31 c, 31 d, 31 e, and 31 f can move straight along the surface of thetest tray facing the opening units when the threaded shaft 32 b isrotated. That is, the internally threaded nut 32 d functions as anapparatus transforming a rotation motion of the threaded shaft 32 b to alinear motion. Therefore, the threaded shaft 32 b, rotational belt 32 c,and internally threaded nut 32 d function together as a driving forcetransferring apparatus that transforms a rotational motion of the motor32 a to a linear motion and transfers it to the opening units 31 a, 31b, 31 c, 31 d, 31 e, and 31 f.

The pair of guide rails 32 e is mounted onto both end portions of thebase plate 33 in such a way that their rails are parallel to the movingdirection of the opening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f.

The pair of guide blocks 32 f is slidably coupled, in their lowerportions, onto the pair of guide rails 32 e, respectively. Also, thepair of guide blocks 32 f is coupled, in their upper portions, to theinstallation plate 35.

Here, although the position changing apparatus 32 according to thepresent invention is implemented in such a way that the motor transfersits rotation motion to the threaded shaft using a rotational belt tochange the position of the opening units, it will be appreciated to theskilled person in the art that it can be variously modified such thatthe motor can directly rotate the threaded shaft or the motor withoutthe rotational belt, and, other parts associated with therewith can bereplaced with a cylinder as a driving source, etc.

The base plate 33 serves to support the above-described elements andallows them to be linearly moved toward the test tray. Specifically, themotor 32 a, threaded shaft 32 b, guide rails 32 e, etc., are mounted onthe base plate 33. The base plate 33 supports the installation plate 35through the guide blocks 32 f and coupling blocks 36, thereby supportingthe opening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f installed onthe installation plate 35.

The base cylinder 34 serves to lift the base plate 33 up or down toselectively secure an operation distance that is necessary for theopening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f to open inserts ofa test tray.

Also, the installation plate 35 is formed as a plate shape, on whoseupper side the ascending/descending cylinders 31 a-2, 31 c-2, and 31 e-2are fixedly installed in a 2×3 matrix-form, and onto whose lower sidethe guide blocks 32 f and the coupling blocks 36 are detachably coupled.That is, since the opening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 fare integrated into a module through the installation plate 35, when theinstallation plate 35 is moved or separated from the guide blocks 32 fand the coupling blocks 36, the opening units 31 a, 31 b, 31 c, 31 d, 31e, and 31 f are also moved or separated together with the installationplate 35.

The coupling blocks 36 is configured to couple the internally threadednuts 32 d to the installation plate 35.

Therefore, when the motor 32 a rotates, the threaded shaft 32 b isrotated, which enables the internally threaded nut 32 d to movelinearly. Then, the installation plate 35 coupled to the internallythreaded nut 32 d through the coupling blocks 36 is also moved.Therefore, the 6 opening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f onthe installation plate 35 are moved as well.

The following is a description of the operation of the opening apparatusaccording to the present invention, with reference to FIGS. 3, 7, 8, 9,and 10.

Firstly, a test tray (not shown) is transferred and located above theopening units 31 a, 31 b, 31 c, 31 d, 31 e, and 31 f as shown in FIG. 3.Then, the base cylinder 34 lifts the base plate 33 up at a certainheight to secure a distance that is necessary for the opening units 31a, 31 b, 31 c, 31 d, 31 e, and 31 f to perform an opening operation, asshown in FIG. 7. As a result, as shown in FIG. 7, the position changingapparatus 32 and the installation plate 35, which are mounted on thebase plate 33, are also lifted up together with the base plate 33 tothat certain height, and the opening units 31 a, 31 b, 31 c, 31 d, 31 e,and 31 f installed on the installation plate 35 are also lifted up tothe same height.

After that, as shown in FIG. 8, the opening unit 31 a is operated insuch a way that: when the ascending/descending cylinder 31 a-2 lifts theopener 31 a-1 up toward the test tray, 16 pairs of opening pins of theopener 31 a-1 lift up the locker pairs of the corresponding inserts, andthus the inserts are opened. At this state, a pick-and-place apparatusprovides 16 semiconductor devices held thereby to the opened 16 inserts,which is called a loading. (On the other hand, the pick-and-placeapparatus perform an unloading by picking up the 16 semiconductordevices loaded on the inserts.) After completing the loading, theascending/descending cylinder 31 a-2 lowers the opener 31 a-1, and thusthe inserts are closed.

After that, like the operation associated with the opening unit 31 a,the opening unit 31 b is operated in such a way that: theascending/descending cylinder 31 b-2 (not shown) lifts up the opener 31b-1; and the opener 31 b-1 can open the inserts.

In the same way, the rest of the opening units 31 c, 31 d, 31 e, and 31f are operated to open corresponding inserts.

After the operation of the opening units 31 a, 31 b, 31 c, 31 d, 31 e,and 31 f is completed, the motor 32 a is operated to rotate the threadedshaft 32 b. According to the rotation of the threaded shaft 32 b, theinstallation plate 35 is moved horizontally along the arrow direction Bshown in FIG. 3 at a certain distance, under the test tray in ahorizontal state, and located at the position as shown in FIG. 9.

In the state shown in FIG. 9, the opening units 31 a, 31 b, 31 c, 31 d,31 e, and 31 f are sequentially operated in such a way to opencorresponding inserts and then close them, in the same fashion as thepreviously described operation thereof. When all the opening units 31 a,31 b, 31 c, 31 d, 31 e, and 31 f finish their operations in the state ofFIG. 9, the motor 32 a is operated to locate the installation plate 35at a position as shown in FIG. 10.

In the state shown in FIG. 10, only the opening units 31 b, 31 d, and 31f are sequentially operated to perform an operation for the rest of theinserts that do not complete their operations.

Therefore, the opening operations for all the inserts of on the testtray are sequentially performed.

When all the operations in the state shown in FIG. 10 are completed, themotor 32 a is rotated backward and the base cylinder 34 is operated tolower the base plate 33 by the previously lifted height, therebyrestoring the inserting-opening apparatus to the state shown in FIG. 3.

As well, when the present test tray should be replaced with another onebecause the size of semiconductor devices to be tested is different fromthat of given semiconductor devices, the insert-opening apparatusaccording to the present invention simplifies a replacement work in sucha way that the installation plate 35 is separated from the guide blocks32 f and the coupling blocks 36, and then another installation plate,having opening units corresponding to the replaced test tray, isre-installed to the guide blocks 32 f and the coupling blocks 36.

Although the preferred embodiments of the present invention have beendisclosed for illustrative purposes, those skilled in the art willappreciate that various modifications, additions and substitutions arepossible, without departing from the scope and spirit of the inventionas disclosed in the accompanying claims.

INDUSTRIAL APPLICABILITY

The test handler according to the present invention can be applied tothe systems that test fabricated semiconductor devices.

1. A test handler comprising: a test tray, on one side of which aplurality of inserts are arrayed, wherein each insert can be loaded atleast one semiconductor device thereon; at least one opening unit foropening inserts at one part of the one side of the test tray; and aposition changing apparatus for moving at least one opening unit in sucha way that the at least one opening unit can be located at another partof the one side of the test tray, such that the at least one openingunit can open inserts at said another part of the one side of the testtray.
 2. The test handler according to claim 1, further comprising apick-and-place apparatus for loading the semiconductor devices on thetest tray or picking up the semiconductor devices from the test tray,wherein the position changing apparatus moves the at least one openingunit independently of the pick-and-place apparatus.
 3. The test handleraccording to claim 1, wherein: the semiconductor device is loaded on orpicked up from the test tray of a horizontal posture; and the at leastone opening unit is horizontally moved.
 4. The test handler according toclaim 1, wherein the opening unit includes: a opener for contacting andopening the inserts at the one part of the one side of the test tray;and a linear moving apparatus for moving the opener toward the insertssuch that the opener can contact the inserts.
 5. The test handleraccording to claim 4, wherein the linear moving apparatus is a cylinder.6. The test handler according to claim 1, wherein the position changingapparatus includes: a driving source for generating driving forcenecessary for movement of the at least one opening unit; and a drivingforce transferring apparatus for transferring the driving force from thedriving source to the opening unit.
 7. The test handler according toclaim 6, wherein the driving source is a motor.
 8. The test handleraccording to claim 7, wherein the driving force transferring apparatusincludes: a threaded shaft, being rotated forward or backward accordingto operation of the motor; and an internally threaded nut, beingreceived the threaded shaft, being moved linearly along the axis of thethreaded shaft according to the rotation of the threaded shaft, andbeing coupled to the opening unit.
 9. The test handler according toclaim 6, wherein the opening unit is integrated into a module which isdetachably coupled to the driving force transferring apparatus.
 10. Thetest handler according to claim 1, further comprising: a base plate forsupporting the opening unit through the position changing apparatus, inwhich the position changing apparatus is installed on the base plate;and a driver for linearly moving the base plate toward the test tray toselectively secure a distance necessary for an opening operation of theopening unit.
 11. The test handler according to claim 10, wherein thedriver is a cylinder.